description lang="EN" 
Cross-Reference to Related Applications 

[0001] This application is a continuation-in-part of United States Patent Application Serial No. 10/140,796 filed May 7, 2002 entitledGROUP III NITRIDE BASED LIGHT EMITTING DIODE STRUCTURES WITH A QUANTUM WELL AND SUPERLATTICE, GROUP III NITRIDE BASED QUANTUM WELL STRUCTURES AND GROUP III NITRIDE BASED SUPERLATTICE STRUCTURESwhich claims the benefit of, and priority from, Provisional Application Serial No. 60/294,445, filed May 30, 2001 entitledMULTI-QUANTUM WELL LIGHT EMITTING DIODE STRUCTURE,Provisional Application Serial No. 60/294,308, filed May 30, 2001 entitledLIGHT EMITTING DIODE STRUCTURE WITH SUPERLATTICE STRUCTURE andProvisional Application Serial No. 60/294,378, filed.May 30, 2001 entitledLIGHT EMITTING DIODE STRUCTURE WITH MULTI-QUANTUM WELL AND SUPERLATTICE STRUCTURE,the disclosures of which are hereby incorporated herein by reference in their entirety as if set forth fully herein. 

 Field of the Invention 

[0002] This invention relates to microelectronic devices and fabrication methods therefor, and more particularly to structures which may be utilized in Group III nitride semiconductor devices, such as light emitting diodes (LEDs). 

 Background of the Invention 

[0003] Light emitting diodes are widely used in consumer and commercial applications. As is well known to those having skill in the art, a light emitting diode generally includes a diode region on a microelectronic substrate, The microelectronic substrate may comprise, for example, gallium arsenide, gallium phosphide, alloys thereof, silicon carbide and/or sapphire. Continued developments in LEDs have resulted in highly efficient and mechanically robust light sources that can cover the visible spectrum and beyond. These attributes, coupled with the potentially long service life of solid state devices, may enable a variety of new display applications, and may place LEDs in a position to compete with the well entrenched incandescent lamp. 

[0004] One difficulty in fabricating Group III nitride based LEDs, such as gallium nitride based LEDs, has been with the fabrication of high quality gallium nitride. Typically, gallium nitride LEDs have been fabricated on sapphire or silicon carbide substrates. Such substrates may result in mismatches between the crystal lattice of the substrate and the gallium nitride. Various techniques have been employed to overcome potential problems with the growth of gallium nitride on sapphire and/or silicon carbide. For example, aluminum nitride (AlN) may be utilized as a buffer between a silicon carbide substrate and a Group III active layer, particularly a gallium nitride active layer. Typically, however, aluminum nitride is insulating rather than conductive. Thus, structures with aluminum nitride buffer layers typically require shorting contacts that bypass the aluminum nitride buffer to electrically link the conductive silicon carbide substrate to the Group III nitride active layer. 

[0005] Alternatively, conductive buffer layer materials such as gallium nitride (GaN), aluminum gallium nitride (AlGaN), or combinations of gallium nitride and aluminum gallium nitride may allow for elimination of the shorting contacts typically utilized with AlN buffer layers. Typically, eliminating the shorting contact reduces the epitaxial layer thickness, decreases the number of fabrication steps required to produce devices, reduces the overall chip size, and/or increases the device efficiency. Accordingly, Group III nitride devices may be produced at lower cost with a higher performance. Nevertheless, although these conductive buffer materials offer these advantages, their crystal lattice match with silicon carbide is less satisfactory than is that of aluminum nitride. 

[0006] The above described difficulties in providing high quality gallium nitride may result in reduced efficiency the device. Attempts to improve the output of Group III nitride based devices have included differing configurations of the active regions of the devices. Such attempts have, for example, included the use of single and/or double heterostructure active regions. Similarly, quantum well devices with one or more Group III nitride quantum wells have also been described. While such attempts have improved the efficiency of Group III based devices, further improvements may still be achieved. 

 Summary of the Invention 

[0007] Some embodiments of the present invention provide Group III nitride based light emitting devices and methods of fabricating Group III nitride based light emitting devices that include an n-type Group III nitride layer, a Group III nitride based active region on the n-type Group III nitride, layer and including at least one quantum well structure, a Group III nitride layer including indium on the active region, a p-type Group III nitride layer including aluminum on the Group III nitride layer including indium, a first contact on the n-type Group III nitride layer and a second contact on the p-type Group III nitride layer. 

[0008] In further embodiments of the present invention, the Group III nitride layer including indium also includes aluminum. For example, the Group III nitride layer including indium may include InAlGaN. The Group III nitride layer including indium may also include InGaN. The Group III nitride layer including indium may be from about 20 to about 320 Å thick. 

[0009] In particular embodiments of the present invention, the Group III nitride layer including indium includes a layer of InAlGaN having a higher A1 composition in a region distal from the active region than is present in a region proximate the active region. In some embodiments, the InAlGaN layer may be continuously graded. In other embodiments, the InAlGaN layer may include a plurality of InAlGaN layers having different Al and/or In compositions. 

[0010] In further embodiments of the present invention, the Group III nitride layer including indium includes a first layer of InxAlyGa1-x-yN, where 0<x≤0.2 and 0≤y≤0.4 and a second layer of InwAlzGa1-w-zN, where 0<w≤0.2 and y≤z<1. The first layer may have a thickness of from about 10 to about 200 Å and the second layer may have a thickness of from about 10 to about 120 Å. In particular embodiments, the first layer has a thickness of about 80 Å, x=0.1 and y=0.25 and the second layer has a thickness of about 30 Å, w=0.05 and z=0.55. 

[0011] In additional embodiments of the present invention, the light emitting devices further include a p-type Group III nitride layer disposed between the second contact and the p-type Group in nitride layer including aluminum. The p-type Group III nitride layer disposed between the second contact and the p-type Group nitride layer including aluminum may also include indium. The p-type Group III nitride layer including aluminum may also include indium. 

[0012] In certain embodiments of the present invention, the light emitting devices include a silicon carbide substrate disposed between the first contact and the n-type Group III nitride layer. 

[0013] Some embodiments of the present invention provide light emitting devices and methods of fabricating light emitting devices that include an n-type gallium nitride based layer on a substrate, a gallium nitride based active region on the n-type gallium nitride based layer and include at least one quantum well structure, a gallium nitride based layer including indium on the active region, a p-type gallium nitride based layer including aluminum on the gallium nitride based layer including indium, a first contact on the n-type gallium nitride based layer and a second contact on the p-type gallium nitride based layer. 

[0014] In particular embodiments of the present invention, the n-type gallium nitride layer includes an n-type AlGaN layer on the substrate and an n-type GaN layer on the n-type AlGaN layer. The gallium nitride based active region may include a plurality of InGaN/GaN quantum wells. 

[0015] In further embodiments of the present invention, the p-type gallium nitride based layer includes a p-type AlGaN layer on the gallium nitride based layer including indium and a p-type GaN layer on the p-type AlGaN layer. The second contact is on the p-type GaN layer. The gallium nitride based layer including indium may include a first layer of InxAlyGa1-x-yN, where 0<x≤0.2 and 0≤y≤0.4 and a second layer of InwAlzGa1-w-zN, where 0<w≤0.2 and y≤z<1. The first layer may have a thickness of from about 10 to about 200 Å and the second layer may have a thickness of from about 10 to about 120 Å. In particular embodiments of the present invention, the first layer has a thickness of about 80 Å, x=0.1 and y=0.25 and the second layer has a thickness of about 30 Å, w=0.05 and z=0.55. 

[0016] In still further embodiments of the present invention, the substrate is a silicon carbide substrate and the first contact is on the silicon carbide substrate opposite the n-type AlGaN layer. 

 Clauses setting out Further Aspects and Embodiments 

[0017] 
1. A Group III nitride based light emitting device, comprising: an n-type Group III nitride layer; a Group III nitride based active region on the n-type-Group III nitride layer and comprising at least one quantum well structure; a Group III nitride layer including indium on the active region; a p-type Group III nitride layer including aluminum on the Group III nitride layer including indium; a first contact on the n-type Group III nitride layer; and a second contact on the p-type Group III nitride layer.
2. The light emitting device of Clause 1, wherein the Group III nitride layer including indium further comprises aluminum.
3. The light emitting device of Clause 2, wherein the Group III nitride layer including indium comprises InAlGaN.
4. The light emitting device of Clause 2, wherein the Group III nitride layer including indium comprises InGaN.
5. The light emitting device of Clause 1, wherein the Group III nitride layer including indium is from about 20 to about 320 Å thick.
6. The light emitting device of Clause 1, wherein the Group III nitride layer including indium comprises a layer of InAlGaN having a higher Al composition in a region distal from the active region than is present in a region proximate the active region.
7. The light emitting device of Clause 6, wherein the InAlGaN layer is continuously graded.
8. The light emitting device of Clause 6, wherein the InAlGaN layer comprises a plurality of InAlGaN layers having different Al compositions.
9. The light emitting device of Clause 1, wherein the Group III nitride layer including indium comprises: a first layer of Inx Aly Ga1-x-y N, where 0<x≤0.2 and 0≤y≤0.4; and a second layer of Inw Alz Gaq-w-z N, where 0<w≤0.2 and y≤z<1.
10. The light emitting device of Clause 9, wherein the first layer has a thickness of from about 10 to about 200 Å and the second layer has a thickness of from about 10 to about 120 Å.
11. The light emitting device of Clause 10, wherein the first layer has a thickness of about 80 Å, x=0.1 and y=0.25 and the second layer has a thickness of about 30 Å, w=0.05 and z=0.55.
12. The light emitting device of Clause 1, further comprising a p-type Group III nitride layer disposed between the second contact and the p-type Group III nitride layer including aluminum.
13. The light emitting device of Clause 12, wherein the p-type Group III nitride layer disposed between the second contact and the p-type Group III nitride layer including aluminum also includes indium.
14. The light emitting device of Clause 1, wherein the p-type Group III nitride layer including aluminum also includes indium.
15. The light emitting device of Clause 1, further comprising a silicon carbide substrate disposed between the first contact and the n-type Group III nitride layer.
16. A light emitting device, comprising an n-type gallium nitride based layer on a substrate; a gallium nitride based active region on the n-type gallium nitride based layer and comprising at least one quantum well structure; a gallium nitride based layer including indium on the active region; a p-type gallium nitride based layer including aluminum on the gallium nitride based layer including indium; a first contact on the n-type gallium nitride based layer; and a second contact on the p-type gallium nitride based layer.
17. The light emitting device of Clause 16, wherein the n-type gallium nitride layer comprises: an n-type AlGaN layer on the substrate; and an n-type GaN layer on the n-type AlGaN layer.
18. The light emitting device of Clause 17, wherein the gallium nitride based active region comprises a plurality of InGaN/GaN quantum wells.
19. The light, emitting device of Clause 18, wherein the p-type gallium nitride based layer comprises: a p-type AlGaN layer on the gallium nitride based layer including indium; and a p-type GaN layer on the p-type AlGaN layer; and wherein the second contact is on the p-type GaN layer.
20. The light emitting device of Clause 19, wherein the gallium nitride based layer including indium comprises: a first layer of Inx Aly Ga1-x-y N, where 0<x≤0.2 and 0≤y≤0.4; and a second layer of Inw Alz Ga1-w-z N, where 0<w≤0.2 and y≤z<1.
21. The light emitting device of Clause 20, wherein the first layer has a thickness of from about 10 to about 200 Å and the second layer has a thickness of from about 10 to about 120 Å.
22. The light emitting device of Clause 21 , wherein the first layer has a thickness of about 80 Å, x=0.1 and y=0.25 and the second layer has a thickness of about 30 Å, w=0.05 and z=0.55.
23. The light emitting device of Clause 19, wherein the substrate comprises silicon carbide and wherein the first contact is on the silicon carbide substrate opposite the n-type AlGaN layer.
24. A method of fabricating a Group III nitride based light emitting device, comprising: forming an n-type Group III nitride layer; forming a Group III nitride based active region on the n-type Group III nitride layer and comprising at least one quantum well structure; forming a Group III nitride layer including indium on the active region; forming a p-type Group III nitride layer including aluminum On the Group III nitride layer including indium; forming a first contact on the n-type Group III nitride layer; and forming a second contact on the p-type Group III nitride layer.
25. The method of Clause 24, wherein forming a Group III nitride layer including indium comprises forming a Group III nitride layer including indium and aluminum.
26. The method of Clause 25, wherein forming a Group III nitride layer including indium and aluminum comprises forming an InAlGaN layer.
27. The method of Clause 25, wherein forming a Group III nitride layer including indium and aluminum comprises forming an InGaN layer.
28. The method of Clause 24, wherein the Group III nitride layer including indium is from about 20 to about 320 Å thick.
29. The method of Clause 24, wherein forming a Group III nitride layer including indium comprises forming a layer of InAlGaN having a higher Al composition in a region distal from the active region than is present in a region proximate the active region.
30. The method of Clause 29, wherein the InAlGaN layer is continuously graded.
31. The method of Clause 29, wherein forming a layer of InAlGaN comprises forming a plurality of InAlGaN layers having different Al compositions..
32. The method of Clause 24, wherein forming a Group III nitride layer including indium comprises: forming a first layer of Inx Aly Ga1-x-y N, where 0<x≤0.2 and 0≤y≤0.4; and forming a second layer of Inw Alz Ga1-w-z N, where 0<w≤0.2 and y≤z<1.
33. The method of Clause 32, wherein the first layer has a thickness of from about 10 to about 200 Å and the second layer has a thickness of from about 10 to about 120 Å.
34. The method of Clause 33, wherein the first layer has a thickness of about 80 Å, x=0.1 and y=0.25 and the second layer has a thickness of about 30 Å, w=0.05 and z=0.55.
35. The method of Clause 24, further comprising forming a p-type Group III nitride layer disposed between the second contact and the p-type Group III nitride layer including aluminum.
36. The method of Clause 35, wherein the p-type Group III nitride layer disposed between the second contact and the p-type Group III nitride layer including aluminum also includes indium.
37. The method of Clause 24 wherein the p-type Group III nitride layer including aluminum also includes indium.
38. The method of Clause 24 forming an n-type Group III nitride layer comprises forming an n-type Group III nitride layer on a silicon carbide substrate and wherein forming a first contact comprises forming a first contact on the silicon carbide substrate opposite the n-type Group III nitride layer.
39. A method of fabricating a light emitting device, comprising forming an n-type gallium nitride based layer on a substrate; forming a gallium nitride based active region on the n-type gallium nitride based layer and comprising at least one quantum well structure; forming a gallium nitride based layer including indium on the active region; forming a p-type gallium nitride based layer including aluminum on the gallium nitride based layer including indium; forming a first contact on the n-type gallium nitride based layer; and forming a second contact on the p-type gallium nitride based layer.
40. The method of Clause 39, wherein forming an n-type gallium nitride layer comprises: forming an n-type AlGaN layer on the substrate; and forming an n-type GaN layer on the n-type AlGaN layer.
41. The method of Clause 40, wherein forming a gallium nitride based active region comprises forming a plurality of InGaN/GaN quantum wells.
42. The method of Clause 40, wherein forming a p-type gallium nitride based layer comprises: forming a p-type AlGaN layer on the gallium nitride based layer including indium; and forming a p-type GaN layer on the p-type AlGaN layer; and wherein forming a second contact comprises forming a second contact on the p-type GaN layer.
43. The method of Clause 42, wherein forming. a gallium nitride based layer including indium comprises: forming a first layer Of Inx Aly Ga1-x-y N, where 0<x≤0.2 and 0≤y≤0.4; and forming a second layer of Inw Alz Ga1-w-z N, where 0<w≤0.2 and y≤z<1.
44. The method of Clause 43, wherein the first layer has a thickness of from about 10 to about 200 Å and the second layer has a thickness of from about 10 to about 120 Å.
45. The method of Clause 44, wherein the first layer has a thickness of about 80 Å, x=0.1 and y=0.25 and the second layer has a thickness of about 30 Å, w=0.05 and z=0.55.
46. The method of Clause 42, wherein the substrate comprises silicon carbide and wherein forming a first contact comprised forming a first contact on the silicon carbide substrate opposite the n-type AlGaN layer.

 Brief Description of the Drawings 

[0018] Other features of the present invention will be more readily understood from the following detailed description of specific embodiments thereof when read in conjunction with the accompanying drawings, in which:
Figure 1 is a schematic illustration of a Group III nitride light emitting diode incorporating embodiments of the present invention;
Figure 2 is a schematic illustration of a Group III nitride light emitting diode incorporating further embodiments of the present invention;
Figure 3 is a schematic illustration of a quantum well structure and a multi-quantum well structure according to additional embodiments of the present invention; and
Figure 4 is a schematic illustration of a Group III nitride light emitting diode incorporating further embodiments of the present invention.

 Detailed Description of Preferred Embodiments 

[0019] The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown. However, this invention should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the thickness of layers and regions are exaggerated for clarity. Like numbers refer to like elements throughout. As used herein the term "and/or" includes any and all combinations of one or more of the associated listed items. 

[0020] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. 

[0021] It will be understood that when an element such as a layer, region or substrate is referred to as being "on" or extending "onto" another element, it can be directly on or extend directly onto the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or extending "directly onto" another element, there are no intervening elements present. It will also be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present. Like numbers refer to like elements throughout the specification. 

[0022] It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention. 

[0023] Furthermore, relative terms, such as "lower" or "bottom" and "upper" or "top," may be used herein to describe one element's relationship to another elements as illustrated in the Figures. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation depicted in the Figures. For example, if the device in the Figures is turned over, elements described as being on the "lower" side of other elements would then be oriented on "upper" sides of the other elements. The exemplary term "lower", can therefore, encompasses both an orientation of "lower" and "upper," depending of the particular orientation of the figure. Similarly, if the device in one of the figures is turned over, elements described as "below" or "beneath" other elements would then be oriented "above" the other elements. The exemplary terms "below" or "beneath" can, therefore, encompass both an orientation of above and below. 

[0024] Embodiments of the present invention are described herein with reference to cross-section illustrations that are schematic illustrations of idealized embodiments of the present invention. As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments of the present invention should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an etched region illustrated or described as a rectangle will, typically, have rounded or curved features. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region of a device and are not intended to limit the scope of the present invention. 

[0025] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein. 

[0026] It will also be appreciated by those of skill in the art that references to a structure or feature that is disposed "adjacent" another feature may have portions that overlap or underlie the adjacent feature. 

[0027] Although various embodiments of LEDs disclosed herein include a substrate, it will be understood by those skilled in the art that the crystalline epitaxial growth substrate on which the epitaxial layers comprising an LED are grown may be removed, and the freestanding epitaxial layers may be mounted on a substitute carrier substrate or submount which may have better thermal, electrical, structural and/or optical characteristics than the original substrate. The invention described herein is not limited to structures having crystalline epitaxial growth substrates and may be utilized in connection with structures in which the epitaxial layers have been removed from their original growth substrates and bonded to substitute carrier substrates. 

[0028] Embodiments of the present invention will be described with reference to Figure 1 that illustrates a light emitting diode (LED) structure 40. The LED structure 40 of Figure 1 includes a substrate 10, which is preferably 4H or 6H n-type silicon carbide. Substrate 10 may also comprise sapphire, bulk gallium nitride or another suitable substrate. Also included in the LED structure 40 of Figure 1 is a layered semiconductor structure comprising gallium nitride-based semiconductor layers on substrate 10 . Namely, the LED structure 40 illustrated includes the following layers: a conductive buffer layer 11, a first silicon-doped GaN layer 12, a second silicon doped GaN layer 14, a superlattice structure 16 comprising alternating layers of silicon-doped GaN and/or InGaN, an active region 18, which may be provided by a multi-quantum well structure, an undoped GaN and/or AlGaN layer 22, an AlGaN layer 30 doped with a p-type impurity, and a GaN contact layer 32, also doped with a p-type impurity. The structure further includes an n-type ohmic contact 23 on the substrate 10 and a p-type ohmic contact 24 on the contact layer 32. 

[0029] Buffer layer 11 is preferably n-type AlGaN. Examples of buffer layers between silicon carbide and group III-nitride materials are provided in U.S. Patents 5,393,993 and 5,523,589 , and U.S. Application Serial No. 09/154,363 entitled "Vertical Geometry InGaN Light Emitting Diode" assigned to the assignee of the present invention, the disclosures of which are incorporated by reference as if fully set forth herein. Similarly, embodiments of the present invention may also include structures such as those described in United States Patent No. 6,201,262 entitled "Group III Nitride Photonic Devices on Silicon Carbide Substrates With Conductive Buffer Interlay Structure," the disclosure of which is incorporated herein by reference as if set forth fully herein. 

[0030] GaN layer 12 is preferably between about 500 and 4000 nm thick inclusive and is most preferably about 1500 nm thick. GaN layer 12 may be doped with silicon at a level of about 5x10<17>to 5x10<18>cm<-3>. GaN layer 14 is preferably between about 10 and 500 Å thick inclusive, and is most preferably about 80 Å thick. GaN layer 14 may be doped with silicon at a level of less than about 5x10<19>cm<-3>. 

[0031] As illustrated in Figure 1 , a superlattice structure 16 according to embodiments of the present invention includes alternating layers of InXGa1-XN and InYGa1-YN, wherein X is between 0 and 1 inclusive and X is not equal to Y.
Preferably, X=4 and the thickness of each of the alternating layers of InGaN is about 5-40 Å thick inclusive, and the thickness of each of the alternating layers of GaN is about 5-100 Å thick inclusive. In certain embodiments, the GaN layers are about 30 Å thick and the InGaN layers are about 15 Å thick. The superlattice structure 16 may include from about 5 to about 50 periods (where one period equals one repetition each of the InXGa1-XN and InYGa1-YN layers that comprise the superlattice). In one embodiment, the superlattice structure 16 comprises 25 periods. In another embodiment; the superlattice structure 16 comprises 10 periods.. The number of periods, however, may be decreased by, for example, increasing the thickness of the respective layers. Thus, for example, doubling the thickness of the layers may be utilized with half the number of periods. Alternatively, the number and thickness of the periods may be independent of one another. 

[0032] Preferably, the superlattice 16 is doped with an n-type impurity such as silicon at a level of from about 1x10<17>cm<-3>to about 5x10<19>cm<-3>. Such a doping level maybe actual doping or average doping of the layers of the superlattice 16. If such doping level is an average doping level, then it may be beneficial to provide doped layers adjacent the superlattice structure 16 that provide the desired average doping which the doping of the adjacent layers is averaged over the adjacent layers and the superlattice structure 16. By providing the superlattice 16 between substrate 10 and active region 18, a better surface may be provided on which to grow InGaN-based active region 18. While not wishing to be bound by any theory of operation, the inventors believe that strain effects in the superlattice structure 16 provide a growth surface that is conducive to the growth of a high-quality InGaN-containing active region. Further, the superlattice is known to influence the operating voltage of the device. Appropriate choice of superlattice thickness and composition parameters can reduce operating voltage and increase optical efficiency. 

[0033] The superlattice structure 16 may be grown in an atmosphere of nitrogen or other gas, which enables growth of higher-quality InGaN layers in the structure. By growing a silicon-doped InGaN/GaN superlattice on a silicon-doped GaN layer in a nitrogen atmosphere, a structure having improved crystallinity and conductivity with optimized strain may be realized. 

[0034] In certain embodiments of the present invention, the active region 18 may comprise a single or multi-quantum well structure as well as single or double heterojunction active regions. In particular embodiments of the present invention, the active region 18 comprises a multi-quantum well structure that includes multiple InGaN quantum well layers separated by barrier layers (not shown in Figure 1 ). 

[0035] Layer 22 is provided on active region 18 and is preferably undoped GaN or AlGaN between about 0 and 120 Å thick inclusive. As used herein, undoped refers to a not intentionally doped. Layer 22 is preferably about 35 Å thick. If layer 22 comprises AlGaN, the aluminum percentage in such layer is preferably about 10-30% and most preferably about 24%. The level of aluminum in layer 22 may also be graded in a stepwise or continuously decreasing fashion. Layer 22 may be grown at a higher temperature than the growth temperatures in quantum well region 25 in order to improve the crystal quality of layer 22. Additional layers of undoped GaN or AlGaN may be included in the vicinity of layer 22. For example, LED 1 may include an additional layer of undoped AlGaN about 6-9Å thick between the active region 18 and the layer 22. 

[0036] An AlGaN layer 30 doped with a p-type impurity such as magnesium is provided on layer 22. The AlGaN layer 30 may be between about 0 and 300 Å thick inclusive and is preferably about 130 Å thick. A contact layer 32 of p-type GaN is provided on the layer 30 and is preferably about 1800 Å thick. Ohmic contacts 24 and 25 are provided on the p-GaN contact layer 32 and the substrate 10 , respectively. 

[0037] Figure 2 illustrates further embodiments of the present invention incorporating a multi-quantum well active region. The embodiments of the present invention illustrated in Figure 2 include a layered semiconductor structure 100 comprising gallium nitride-based semiconductor layers grown on a substrate 10. As described above, the substrate 10 may be SiC, sapphire or bulk gallium nitride. As is illustrated in Figure 2 , LEDs according to particular embodiments of the present invention may include a conductive buffer layer 11, a first silicon-doped GaN layer 12, a second silicon doped GaN layer 14, a superlattice structure 16 comprising alternating layers of silicon-doped GaN and/or InGaN, an active region 125 comprising a multi-quantum well structure, an undoped GaN or AlGaN layer 22, an AlGaN layer 30 doped with a p-type impurity, and a GaN contact layer 32, also doped with a p-type impurity. The LEDs may further include an n-type ohmic contact 23 on the substrate 10 and a p-type ohmic contact 24 on the contact layer 32. In embodiments of the present invention where the substrate 10 is sapphire, the n-type ohmic contact 23 would be provided on n-type GaN layer 12 and/or n-type GaN layer 14. 

[0038] As described above with reference to Figure 1 , buffer layer 11 is preferably n-type AlGaN. Similarly, GaN layer 12 is preferably between about 500 and 4000 nm thick inclusive and is most preferably about 1500 nm thick. GaN layer 12 may be doped with silicon at a level of about 5x10<17>to 5x10<18>cm<-3>. GaN layer 14 is preferably between about 10 and 500 Å thick inclusive, and is most preferably about 80 Å thick. GaN layer 14 may be doped with silicon at a level of less than about 5x10<19>cm<-3>. The superlattice structure 16 may also be provided as described above with reference to Figure 1 . 

[0039] The active region 125 comprises a multi-quantum well structure that includes multiple InGaN quantum well layers 120 separated by barrier layers 118. The barrier layers 118 comprise InXGa1-XN where 0≤X<1. Preferably the indium composition of the barrier layers 118 is less than that of the quantum well layers 120, so that the barrier layers 118 have a higher bandgap than quantum well layers 120. The barrier layers 118 and quantum well layers 120 may be undoped (i.e.not intentionally doped with an impurity atom such as silicon or magnesium). However, it may be desirable to dope the barrier layers 118 with Si at a level of less than 5x10<19>cm<-3>, particularly if ultraviolet emission is desired. 

[0040] In further embodiments of the present invention, the barrier layers 118 comprise AlXInYGa1-X-YN where 0<X<1, 0≤Y<1 and X+Y≤1. By including aluminum in the crystal of the barrier layers 118, the barrier layers 118 may be lattice-matched to the quantum well layers 120, thereby providing improved crystalline quality in the quantum well layers 120, which increases the luminescent efficiency of the device. 

[0041] Referring to Figure 3 , embodiments of the present invention that provide a multi-quantum well structure of a gallium nitride based device are illustrated. The multi-quantum well structure illustrated in Figure 3 may provide the active region of the LEDs illustrated in Figure 1 and/or Figure 2 . As seen in Figure 3 , an active region 225 comprises a periodically repeating structure 221 comprising a well support layer 218a having high crystal quality, a quantum well layer 220 and a cap layer 218b that serves as a protective cap layer for the quantum well layer 220. When the structure 221 is grown, the cap layer 218b and the well support layer 218a together form the barrier layer between adjacent quantum wells 220. Preferably, the high quality well support layer 218a is grown at a higher temperature than that used to grow the InGaN quantum well layer 220. In some embodiments of the present invention, the well support layer 218a is grown at a slower growth rate than the cap layer 218b. In other embodiments, lower growth rates may be used during the lower temperature growth process and higher growth rates utilized during the higher temperature growth process. For example, in order to achieve a high quality surface for growing the InGaN quantum well layer 220, the well support layer 218a may be grown at a growth temperature of between about 700 and 900°C. Then, the temperature of the growth chamber is lowered by from about 0 to about 200 °C to permit growth of the high-quality InGaN quantum well layer 220. Then, while the temperature is kept at the lower InGaN growth temperature, the cap layer 218b is grown. In that manner, a multi-quantum well region comprising high quality InGaN layers may be fabricated. 

[0042] The active regions 125 and 225 of Figures 2 and 3 are preferably grown in a nitrogen atmosphere, which may provide increased InGaN crystal quality. The barrier layers 118 , the well support layers 218a and/or the cap layers 218b may be between about 50 - 400 Å thick inclusive. The combined thickness of corresponding ones of the well support layers 218a and the cap layers 218b maybe from about 50-400 Å thick inclusive. Preferably, the barrier layers 118 the well support layers 218a and/or the cap layers 218b are greater than about 90 Å thick and most preferably are about 225 Å thick. Also, it is preferred that the well support layers 218a be thicker than the cap layers 218b . Thus, the cap layers 218b are preferably as thin as possible while still reducing the desorption of Indium from or the degradation of the quantum well layers 220 . The quantum well layers 120 and 220 may be between about 10 - 50 Å thick inclusive. Preferably, the quantum well layers 120 and 220 are greater than 20 Å thick and most preferably are about 25 Å thick. The thickness and percentage of indium in the quantum well layers 120 and 220 may be varied to produce light having a desired wavelength. Typically, the percentage of indium in quantum well layers 120 and 220 is about 25-30%, however, depending on the desired wavelength, the percentage of indium has been varied from about 5% to about 50%. 

[0043] In preferred embodiments of the present invention, the bandgap of the superlattice structure 16 exceeds the bandgap of the quantum well layers 120. This may be achieved by by adjusting the average percentage of indium in the superlattice 16. The thickness (or period) of the superlattice layers and the average Indium percentage of the layers should be chosen such that the bandgap of the superlattice structure 16 is greater than the bandgap of the quantum wells 120. By keeping the bandgap of the superlattice 16 higher than the bandgap of the quantum wells 120, unwanted absorption in the device may be minimized and luminescent emission may be maximized. The bandgap of the superlattice structure 16 may be from about 2.95 eV to about 3.35 eV. In a preferred embodiment, the bandgap of the superlattice structure 16 is about 3.15 eV.. 

[0044] In additional embodiments of the present invention, the LED structure illustrated in Figure 2 includes a spacer layer 17 disposed between the superlattice 16 and the active region 125 . The spacer layer 17 preferably comprises undoped GaN. The presence of the optional spacer layer 17 between the doped superlattice 16 and active region 125 may deter silicon impurities from becoming incorporated into the active region 125. This, in turn, may improve the material quality of the active region 125 that provides more consistent device performance and better uniformity. Similarly, a spacer layer may also be provided in the LED structure illustrated in Figure 1 between the superlattice 16 and the active region 18 . 

[0045] Returning to Figure 2 , the layer 22 may be provided on the active region 125 and is preferably undoped GaN or AlGaN between about 0 and 120 Å thick inclusive. The layer 22 is preferably about 35 Å thick. If the layer 22 comprises AlGaN, the aluminum percentage in such layer is preferably about 10-30% and most preferably about 24%. The level of aluminum in the layer 22 may also be graded in a stepwise or continuously decreasing fashion. The layer 22 may be grown at a higher temperature than the growth temperatures in the active region 125 in order to improve the crystal quality of the layer 22. Additional layers of undoped GaN or AlGaN may be included in the vicinity of layer 22. For example, the LED illustrated in Figure 2 may include an additional layer of undoped AlGaN about 6-9Å thick between the active regions 125 and the layer 22. 

[0046] An AlGaN layer 30 doped with a p-type impurity such as magnesium is provided on layer 22. The AlGaN layer 30 may be between about 0 and 300 Å thick inclusive and is preferably about 130 Å thick. A contact layer 32 of p-type GaN is provided on the layer 30 and is preferably about 1800 Å thick. Ohmic contacts 24 and 25 are provided on the p-GaN contact layer 32 and the substrate 10 , respectively. Ohmic contacts 24 and 25 are provided on the p-GaN contact layer 32 and the substrate 10, respectively. 

[0047] Figure 4 illustrates further embodiments of the present invention. incorporating a Group III-nitride layer incorporating Indium on the active region of the device. For example, an InAlGaN cap structure may be provided. The embodiments of the present invention illustrated in Figure 4 include a layered semiconductor structure 400 comprising gallium nitride-based semiconductor layers grown on a substrate 10. As described above, the substrate 10 may be SiC, sapphire or bulk gallium nitride. In particular embodiments of the present invention the substrate 10 is a SiC substrate having a thickness of from about 50 to about 800 µm and in some embodiments, about 100 µm. 

[0048] As is illustrated in Figure 4 , LEDs according to particular embodiments of the present invention may include a conductive buffer layer 11, a first silicon-doped GaN layer 12, a second silicon doped GaN layer 14, a superlattice structure 16 comprising alternating layers of silicon-doped GaN and/or InGaN, an active region 125 comprising a multi-quantum well structure, an undoped AlInGaN layer 40, an AlGaN layer 30 doped with a p-type impurity, and a GaN contact layer 32, also doped with a p-type impurity. The LEDs may further include an n-type ohmic contact 23 on the substrate 10 and a p-type ohmic contact 24 on the contact layer 32. In embodiments of the present invention where the substrate 10 is sapphire, the n-type ohmic contact 23 would be provided on n-type GaN layer 12 and/or n-type GaN layer 14. 

[0049] As described above with reference to Figures 1 and 2 , the buffer layer 11 may be n-type AlGaN. For example, the buffer layer 11 may be AlGaN doped with Si and having a thickness of from about 100 to about 10.000 Å. In certain embodiments the thickness is about 1500 Å. The GaN layer 12 may be doped with Si and may have a thickness of from about 5000 to 50,000 Å thick inclusive and, in particular embodiments, is about 18,000 Å thick. The GaN layer 12 may be doped with silicon at a level of about 5x10<17>to 5x10<18>cm<-3>. The superlattice structure 16 may also be provided as described above with reference to Figure 1 . For example, the superlattice structure 16 may have from 3 to 35 periods of InGaN/GaN. The thickness of the periods may be from about 30 to about 100 Å. In particular embodiments of the present invention, twenty five (25) periods of InGaN/GaN are provided with the thickness of a period of layers being about 70 Å and the thickness of the GaN or InGaN layer being about 15 Å with the other layer making up the remainder. 

[0050] The active region 325 may include a multi-quantum well structure that includes multiple InGaN quantum well layers 320 separated by barrier layers 318. The barrier layers 318 comprise InXGa1-XN where 0≤X<1. Preferably the indium composition of the barrier layers 318 is less than that of the quantum well layers 320, so that the barrier layers 318 have a higher bandgap than quantum well layers 320. The barrier layers 318 and quantum well layers 320 may be undoped (i.e. not intentionally doped with an impurity atom such as silicon or magnesium). However, it may be desirable to dope the barrier layers 318 with Si at a level of less than 5x10<19>cm<-3>, particularly if ultraviolet emission is desired. 

[0051] In further embodiments of the present invention, the barrier layers 318 comprise AlXInYGa1-X-YN where 0<X<1, 0≤Y<1 and X+Y≤1. By including aluminum in the crystal of the barrier layers 318, the barrier layers 318 may be lattice-matched to the quantum well layers 320, thereby allowing improved crystalline quality in the quantum well layers 320, which can increase the luminescent efficiency of the device. 

[0052] The active region 325 may also be provided as illustrated in Figure 3 and described above with reference to Figures 1 through 3 . In particular embodiments of the present invention, the active region 325 includes 3 or more quantum wells and in certain embodiments, eight (8) quantum wells are provided. The thickness of the quantum well structures may be from about 30 to about 250 Å. In particular embodiments of the present invention, the thickness of a quantum well structure may be about 120 Å with the thickness of the well layer being about 25 Å. 

[0053] The LED structure illustrated in Figure 4 may also include a spacer layer disposed between the superlattice 16 and the active region 325 as described above. 

[0054] Returning to Figure 4 , a Group III-nitride capping layer 40 that includes Indium may be provided on the active region 325 and, more specifically, on the quantum well 320 of the active region 325. The Group III-nitride capping layer 40 may include InAlGaN between about 10 and 320 Å thick inclusive. The capping layer 40 may be of uniform composition, multiple layers of different compositions and/or graded composition. In particular embodiments of the present invention, the capping layer 40 includes a first capping layer having a composition of InxAlyGa1-x-yN, where 0<x≤0.2 and 0≤y≤0.4 and has a thickness of from about 10 to about 200 Å and a second capping layer having a composition of InwAlzGa1-w-zN, where 0<w≤0.2 and y≤z<1 and has a thickness of from about 10 to about 120 Å. In certain embodiments of the present invention, the first capping layer has a thickness of about 80 Å, x=0.1 and y=0.25 and the second capping layer has a thickness of about 30 Å, w=0.05 and z=0.55. The capping layer 40 may be grown at a higher temperature than the growth temperatures in the active region 325 in order to improve the crystal quality of the layer 40. Additional layers of undoped GaN or AlGaN may be included in the vicinity of layer 40. For example, a thin layer of GaN may be provided between a last quantum well layer and the capping layer 40. The capping layer 40 that includes indium may be more closely lattice matched to the quantum wells of the active region 325 and may provide a transition from the lattice structure of the active region 325 to the lattice structure of the p-type layers. Such a structure may result in increased brightness of the device. 

[0055] An AlGaN hole injection layer 42 doped with a p-type impurity such as magnesium is provided on the capping layer 40. The AlGaN layer 42 may be between about 50 and 2500 Å thick inclusive and, in particular embodiments, is about 150 Å thick. The AlGaN layer 42 may be of the composition of AlGa1-xN, where 0≤x≤0.4. In particular embodiments of the present invention, x=0.23 for the AlGaN layer 42. The AlGaN layer 42 may be doped with Mg. In some embodiments of the present invention, the layer 42 may also include Indium. 

[0056] A contact layer 32 of p-type GaN is provided on the layer 42 and may be from about 250 to abut 10,000 Å thick and in some embodiments, about 1500 Å thick. In some embodiments, the contact layer 32 may also include Indium. Ohmic contacts 24 and 25 are provided on the p-GaN contact layer 32 and the substrate 10, respectively. Ohmic contacts 24 and 25 are provided on the p-GaN contact layer 32 and the substrate 10, respectively. 

[0057] In some embodiments of the present invention, the indium containing capping layer 40 may be provided in light emitting devices as described, for example, in United States Provisional Patent Application Serial No.          (Attorney Docket No. 5308-463PR) entitled "ULTRA-THIN OHMIC CONTACTS FOR P-TYPE NTIRIDE LIGHT EMITTING DEVICES" and filed concurrently herewith, United States Patent Application Serial No.         (Attorney Docket No. 5308-468) entitled "LIGHT EMITTING DEVICES HAVING A REFLECTIVE BOND PAD AND METHODS OF FABRICATING LIGHT EMITTING DEVICES HAVING REFLECTIVE BOND PADS" and filed concurrently herewith, United States Patent No. 6,664,560 , United States Patent Application Serial No.       (Attorney Docket No. 5308-457) entitled "LIGHT EMITTING DEVICES HAVING CURRENT BLOCKING STRUCTURES AND METHODS OF FABRICATING LIGHT EMITTING DEVICES HAVING CURRENT BLOCKING STRUCTURES," filed June 30, 2004, U.S. Patent Publication No. 2003/0123164 entitled "LIGHT EMITTING DIODES INCLUDING SUBSTRATE MODIFICATIONS FOR LIGHT EXTRACTION AND MANUFACTURING METHODS THEREFOR" and/or in U.S. Patent Publication No. 2003/0168663 entitled "REFLECTIVE OHMIC CONTACTS FOR SILICON CARBIDE INCLUDING A LAYER CONSISTING ESSENTIALLY OF NICKEL, METHODS OF FABRICATING SAME, AND LIGHT EMITTING DEVICES INCLUDING THE SAME," the disclosures of which is incorporated herein as if set forth in its entirety. 

[0058] Electroluminescence (EL) testing was performed on LED wafers having devices with and without the indium containing capping layer, in particular, an InAlGaN capping layer, as illustrated in Figure 4 . The EL test is an on-wafer test that measures the brightness of LED epitaxial structures. This test is not influenced by the LED fabrication method, chip shaping, or packaging method. Approximately 176 wafers with the structure including the indium containing layer and 615 wafers without the indium containing layer were tested. Both structures were grown continuously on a number of reactors. The reactors were all essentially the same (i.e. none have any special modification for increased brightness, all have been and continue to be suitable for production use). The data from the wafers was binned and shows that the structure with the indium containing layer was approximately 1.15 to 1.25 times brighter than the structure without the indium containing layer. 

[0059] While embodiments of the present invention have been described with multiple quantum wells, the benefits from the teachings of the present invention may also be achieved in single quantum well structures. Thus, for example, a light emitting diode may be provided with a single occurrence of the structure 221 of Figure 3 as the active region of the device. Thus, while different numbers of quantum wells may be utilized according to embodiments of the present invention, the number of quantum wells will typically range from 1 to 10 quantum wells. 

[0060] While embodiments of the present invention have been described with reference to gallium nitride based devices, the teachings and benefits of the present invention may also be provided in other Group III nitrides. Thus, embodiments of the present invention provide Group III nitride based superlattice structures, quantum well structures and/or Group III nitride based light emitting diodes having superlattices and/or quantum wells. 

[0061] In the drawings and specification, there have been disclosed typical preferred embodiments of the invention and, although specific terms are employed, they are used in a generic and descriptive sense only and not for purposes of limitation, the scope of the invention being set forth in the following claims. 

